Abstract:
A method is presented for determining the composition of thin
films containing the elements Bi, Sr, Br, Cu, and Ca. Quantitative x-ray
fluorescence (XRF) consisting of radioactive sources (secondary foil
excitor 241Am-Mo source and 55Pe source), a Si(Li) detector, and a
multichannel analyzer were employed. The XRF system was calibrated by
using sol gel thin films of known element composition and also by
sputtered thin films analyzed by the conventional Rutherford Back
Scattering (RBS). The XRF system has been used to assist and optimize the
sputter target composition required to produce high-Tc BiSrCaCuO films
with the desired metal composition.
